Selectively grown vertical Si MOS transistor with reduced overlap capacitances
Year: 1998
Type: article
Source: Thin Solid Films
Authors: D Klaes, J Moers, A Tönnesmann, S Wickenhäuser, L Vescan, M Marso, T Grabolla, M Grimm, H Lüth
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W1892466326