Work

Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology

Year: 2009

Type: article

Source: Solid-State Electronics

DOI: 10.1016/j.sse.2009.12.012

Authors: J. Widiez, M. Rabarot, S. Saada, J.-P. Mazellier, J. Dechamp, V. Delaye, J.-C. Roussin, F. Andrieu, O. Faynot, S. Deleonibus, P. Bergonzo, L. Clavelier

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Laboratoire d'Intégration des Systèmes et des Technologies

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2045155776

FWCI: 0.99

Cites: 13

Cited by: 26

Related to: 10