Work

Control of laser induced interface traps with in-line corona charge metrology

Year: 2008

Type: conference-paper

Source: International Conference on Advanced Thermal Processing of Semiconductors

DOI: 10.1109/rtp.2008.4690551

Authors: J-L. Everaert, E. Rosseel, C. Ortolland, M. Aoulaiche, T. Hoffmann, T. Pavelka, E. Don

Institutions: IMEC, Semilab (Hungary)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2063374987

FWCI: 0.474

Cites: 7

Cited by: 2

Related to: 10