Author

Yasutoshi Okuno

Observed names: Y. Okuno, Yasutoshi OKUNO, Yasutoshi Okuno Yasutoshi Okuno

Institutions: SCREEN (Japan), SCREEN Semiconductor Solutions Co., Ltd. (Japan)

Observed institutions: Panasonic (Japan), NTT (Japan), Texas Instruments (Japan), SCREEN (Japan), NTT Basic Research Laboratories, IMEC, Taiwan Semiconductor Manufacturing Company (Taiwan), SCREEN Semiconductor Solutions Co., Ltd. (Japan), IBM Research - Albany, The Institute of Scientific and Industrial Research, The University of Osaka, The University of Osaka

ORCID: 0009-0003-5769-0815

Observed ORCID: 0009-0003-5769-0815

OpenAlex ID: A5101694190

Stress Memorization Technique—Fundamental Understanding and Low-Cost Integration for Advanced CMOS Technology Using a Nonselective Process

2009 · Claude Ortolland, Yasutoshi Okuno, et al. · IEEE Transactions on Electron Devices · 35

MOMBE growth characteristics of antimonide compounds

1992 · H. Asahi, T. Kaneko, et al. · Journal of Crystal Growth · 29

MOMBE (Metalorganic Molecular Beam Epitaxy) growth of InGaSb on GaSb

1989 · Tadaaki Kaneko, Hajime Asahi, et al. · Journal of Crystal Growth · 27

Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth

1990 · Yasutoshi Okuno, Hajime Asahi, et al. · Journal of Crystal Growth · 25

Extendibility of Ta2O5 Metal-Insulator-Metal Capacitor Using Ru Electrode

2000 · Akihiko Tsuzumitani, Yasutoshi Okuno, et al. · Japanese Journal of Applied Physics · 21

MOMBE (metalorganic molecular beam epitaxy) growth of InGaAlAsSb system on GaSb

1991 · Hajime Asahi, Tadaaki Kaneko, et al. · Journal of Crystal Growth · 18

Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2

2007 · Kazuo Tsutsui, Ruifei Xiang, et al. · Microelectronic Engineering · 17

Influence of hydrogen on the step flow growth of GaAs on vicinal surfaces by gas-source migration enhanced epitaxy

1992 · H. Asahi, T. Hisaka, et al. · Applied Physics Letters · 17

Observations on RHEED intensity oscillations during the growth of GaSb and InAs by MOMBE

1990 · Tadaaki Kaneko, Hajime Asahi, et al. · Journal of Crystal Growth · 17

Study of the compositional control of the antimonide alloys InGaSb and GaAsSb grown by metalorganic molecular beam epitaxy

1993 · Y. Itani, H. Asahi, et al. · Journal of Applied Physics · 16

MOMBE growth of GaSb and InAsSb using triethylstibine and triethylarsine

1991 · Tadaaki Kaneko, Hajime Asahi, et al. · Journal of Crystal Growth · 15

Improved Growth Kinetic Model for Metalorganic Molecular Beam Epitaxy Using Triethylgallium

1993 · Hajime Asahi, Tadaaki Kaneko, et al. · Japanese Journal of Applied Physics · 14

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MOMBE growth of AlSb and AlGaSb using trimethylamine alane

1993 · Y. Okuno, H. Asahi, et al. · Journal of Crystal Growth · 11

Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects

2022 · Takeshi Nogami, Oleg Gluschenkov, et al. · IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) · 10

Selective Area Epitaxy of GaSb by Metal-Organic Molecular Beam Epitaxy

1993 · Xuefeng Liu, Hajime Asahi, et al. · Japanese Journal of Applied Physics · 8

Ab-initio simulations of higher Miller index Si:SiO2 interfaces for fin field effect transistor and nanowire transistors

2016 · Hongfei Li, Yuzheng Guo, et al. · Journal of Applied Physics · 7

Selective area epitaxy of GaSb and AlGaSb by metalorganic molecular beam epitaxy

1994 · X.F. Liu, H. Asahi, et al. · Journal of Crystal Growth · 7

InGaAsP/InP quantum wires fabricated by focused Ga ion beam implantation

1992 · H. Asahi, S.J. Yu, et al. · Surface Science · 6

Insights into FinFET Structure Collapse: A Reactive Force Field-Based Molecular Dynamics Investigation

2023 · Ryuichi Seki, Naozumi Fujiwara, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 5

Amorphous SiO2 Surface Irregularities and their Influence on Liquid Molecule Adsorption by Molecular Dynamics Analysis

2023 · Masayoshi Takayanagi, Naozumi Fujiwara, et al. · ECS Journal of Solid State Science and Technology · 5

Extendibility Study of Conventional IPA Drying Process From Dynamic Fluid Model for Pattern Collapse

2022 · Masayuki Otsuji, Takayoshi Tanaka, et al. · ECS Transactions · 5

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Pt/BaxSr(1-x)TiO3/Pt Capacitor Technology for 0.15 µm Embedded Dynamic Random Access Memory

2004 · Yoshikazu Tsunemine, Tomonori Okudaira, et al. · Japanese Journal of Applied Physics · 5

Infrared spectroscopy study of the Si–SiO2 interface

1996 · Yasutoshi Okuno, Kyung-ho Park · Applied Physics Letters · 5

MOMBE growth of AlGaSb

1991 · Y. Okuno, H. Asahi, et al. · Journal of Crystal Growth · 5

Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams

2023 · Akira Uedono, Takeshi Nogami, et al. · Journal of Applied Physics · 3

Works count: 43

Citation count: 355

H-index: 12

I10-index: 14