Author

Tsung-Sheng Kang

Observed names: T. S. Kang, T.-S. Kang, T.S. Kang, Tsung Sheng Kang
OpenAlex ID: A5111632995
2011 · M. R. Holzworth, N. G. Rudawski, et al. · Applied Physics Letters · 35
2011 · Lu Liu, Tsung Sheng Kang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 32
2015 · Tsung-Sheng Kang, Fan Ren, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 25
2011 · Chien-Fong Lo, Lu Liu, et al. · Electrochemical and Solid-State Letters · 23
2017 · P.G. Whiting, N.G. Rudawski, et al. · Microelectronics Reliability · 21
2011 · R. C. Fitch, D. E. Walker, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 17
2014 · Ya-Hsi Hwang, Tsung-Sheng Kang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 16
2024 · Chen Zhang, SeungMin Song, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 15
2012 · Michael R. Johnson, David A. Cullen, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 15
2011 · Chien-Fong Lo, L. Liu, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 15
2012 · P.G. Whiting, N.G. Rudawski, et al. · Microelectronics Reliability · 13
2017 · P.G. Whiting, M.R. Holzworth, et al. · Microelectronics Reliability · 11
2013 · M. R. Holzworth, N. G. Rudawski, et al. · Applied Physics Letters · 11
2013 · Erica A. Douglas, Edward Bielejec, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 11
2011 · T. S. Kang, X. T. Wang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 10
2011 · Chien-Fong Lo, T. S. Kang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 10
2012 · Chien-Fong Lo, L. Liu, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 7
2011 · T. S. Kang, C. F. Lo, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 7
2015 · Tsung Sheng Kang, Yi-Hsuan Lin, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 6
2021 · Indira Seshadri, Jennifer Church, et al. · Extreme Ultraviolet (EUV) Lithography · 5
2011 · Lu Liu, Chien-Fong Lo, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 5
2014 · Monta Ray Holzworth, Patrick Whiting, et al. · ECS Transactions · 2
Works count: 39
Citation count: 397
H-index: 12
I10-index: 17
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